| Title: | OS15-1 Efficient detection device for wafer physical defects |
|---|---|
| Publication: | ICAROB2020 |
| Volume: | 25 |
| Pages: | 791-794 |
| ISSN: | 2188-7829 |
| DOI: | 10.5954/ICAROB.2020.OS15-1 |
| Author(s): | Jianyong Chen, Xiaoyan Chen, Chundong Zhao |
| Publication Date: | January 13, 2020 |
| Keywords: | Semiconductor manufacturing, Machine vision, Camera calibration, Programmable logic controller |
| Abstract: | Wafer defect detection is an important part of semiconductor manufacturing. In order to improve the efficiency of semiconductor wafer defect detection, this paper designs an efficient visual inspection device. The device uses programmable logic controller (PLC) as controller for the transmission mechanism and uses servo motor as drive device. A CMOS camera is used to capture wafer images, a computer is used for wafer image processing, and results are displayed on a graphical user interface. Camera calibration is implemented by integrating the mapping relationship between the pixel coordinate system and the world coordinate system, the internal and external parameters of the camera and the distortion coefficient. The device proposed in this paper is low in cost and the detection process is stable and reliable. It provides a new solution for wafer defect detection. |
| PDF File: | https://alife-robotics.co.jp/members2020/icarob/data/html/data/OS/OS15/OS15-1.pdf |
| Copyright: | © The authors. This article is distributed under the terms of the Creative Commons Attribution License 4.0, which permits non-commercial use, distribution and reproduction in any medium, provided the original work is properly cited. See for details: https://creativecommons.org/licenses/by-nc/4.0/ |
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